Application Technology of Intelligent Robot Arm Control in Capacity Improvement of Semiconductor Linkage Equipment
谷财全 GU Cai-quan
（内蒙古科技大学土木工程学院，包头 014010）
（School of Civil Engineering，Inner Mongolia University of Science and Technology，Baotou 014010，China）
摘要：半导体行业作为自动化水平最高的行业，为了提升企业核心竞争力，产能要求不断加大，尤其是一些关键制程设备的产能逐渐成为整个工厂产能瓶颈，而联动设备控制逻辑复杂，更成为产能提升的关键。本文对半导体联动设备制程流程进行充分研究，导入智能自动化控制系统、机械臂控制方案，创新性提出 Product Staging 控制技术方案。实践表明，控制系统架构具有较高的稳定性和安全性，机械臂控制方案和 Product Staging 控制技术方案能够显著提升联动设备产能，满足制造业工厂对终端使用用户的需求。同时，此控制方案在光伏行业、新能源行业等联动设备产能提升中具有广泛的应用前景。
Abstract: The semiconductor industry, as the industry with the highest level of automation, in order to enhance the core competitiveness of enterprises, capacity requirements are increasing, especially the production capacity of some key process equipment has gradually become the bottleneck of the entire factory capacity, and the linkage equipment control logic is complex, and it has become thekey to capacity improvement. In this paper, the manufacturing process of semiconductor linkage equipment is fully studied, intelligent automatic control system is introduced, the control scheme of mechanical arm is introduced, and the technical scheme of Product Staging control is innovatively proposed. Practice has shown that the control system architecture has high stability and security, and the robot arm control scheme and Product Staging control technology scheme can significantly improve the production capacity of linkage equipment to meet the needs of end users in manufacturing plants. At the same time, this control scheme has a wide range of application prospects in the capacity improvement of linked equipment such as photovoltaic industry and new energy industry.
关键词：智能自动化系统；智能机械臂控制；半导体显示；产能提升；Product Staging 技术方案
Key words: intelligent automation system；intelligent robot arm control；semiconductor display；capacity improvement；Product Staging technical solution
中图分类号：TP241 文献标识码：A 文章编号：1006-4311（2024）31-094-03 doi:10.3969/j.issn.1006-4311.2024.31.027
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